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Witryna11 lis 2011 · Abstract. We investigated the N 2 additive effect on the etch rates of TiN and SiO 2 and etch profile of TiN in N 2 /Cl 2 /Ar adaptively coupled plasma (ACP). The mixing ratio of Cl 2 and Ar was fixed at 75 and 25 sccm, respectively. The N 2 flow rate was increased from 0 to 9 sccm under the constant pressure of 10 mTorr. http://qd3dprinter.com/software
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